High performance on-chip array antenna based on metasurface feeding structure for terahertz integrated circuits

Abstract

In this letter a novel on-chip array antenna is investigated which is based on CMOS 20μm Silicon technology for operation over 0.6-0.65 THz. The proposed array structure is constructed on three layers composed of Silicon-Ground-Silicon layers. Two antennas are implemented on the top layer, where each antenna is constituted from three sub-antennas. The sub-antennas are constructed from interconnected dual-rings. Also, the sub-antennas are interconnected to each other. This approach enhances the aperture of the array. Surface waves and substrate losses in the structure are suppressed with metallic via-holes implemented between the radiation elements. To excite the structure, a novel feeding mechanism is used comprising open-circuited microstrip lines that couple electromagnetic energy from the bottom layer to the antennas on the top-layer through metasurface slot-lines in the middle ground-plane layer. The results show the proposed on-chip antenna array has an average radiation gain, efficiency, and isolation of 7.62 dBi, 32.67%, and -30 dB, respectively.